KLA-Tencor/Prometrix SFS-4500/5500 Spare Parts

We stock spare parts for Surfscan 4500 and 5500 Wafer Inspection Systems. All Parts are subject to availability. Please contact us for additional information and pricing.   Surfscan Laser Info and Listings.

ManufacturerPart#DescriptionWorks with ConditionWarrantyPic
Tencor   Below Wafer Sensor SFS 5500 New 90-Day
Tencor   Scan Mirror Assembly SFS 4000 New 90-Day
Tencor 061050 PCB Assy, High Voltage SFS 4500 Used & Tested 90-Day
Venus Scientific 050946 PMT power supply SFS 4500 New 90-Day
Tencor   LED Post Assembly SFS 4500 & 5500 Used & Tested 90-Day
Tencor   AutoCal / AutoZero Sensor SFS 4500 Used & Tested 90-Day
Tencor   AutoCal / AutoZero Sensor SFS 5500 Used & Tested 90-Day
Tencor 063967 PCB Assy, Slave CPU SFS 4500 & 5500 Used & Tested 90-Day
Tencor 077054 PCB Assy, PPC SFS 4500 & 5500 Used & Tested 90-Day
Tencor 128945 PCB Assy, Distribution SFS 5500 Used & Tested 90-Day
Tencor 058457 PCB Assy, Preprocessor SFS 4500 & 5500 Used & Tested 90-Day
Tencor 128066 PCB Assy, PMT Control SFS 4500 & 5500 Used & Tested 90-Day
Tencor 130311 PCB Assy, Below Wafer - Call for availability SFS 5500 Used & Tested 90-Day
Tencor 054453 PCB, Assy, Vacuum Handler - Call for availability SFS 4500 & 5500 Used & Tested 90-Day
Tencor 093254 PCB, Assy, Vacuum Handler - Call for availability SFS 4500 & 5500 Used & Tested 90-Day
Tencor 079553 PMT Preamp Assembly SFS 4500 & 5500 Used & Tested 90-Day
Tencor 063975 PCB Assy, Memory SFS 4500 & 5500 Used & Tested 90-Day
Hamamatsu 071471 Hamamatsu Photomultiplier Tube SFS 4500 & 5500 Used & Tested 90-Day
Tencor 054135 PCB Assembly, I/O SFS 4500 & 5500 Used & Tested 90-Day
Tencor 063983 PCB Assy, Main CPU - Call for availability SFS 4500 & 5500 Used & Tested 90-Day
Tencor 054291 PCB Assembly, Keyboard SFS 4500 & 5500 Used & Tested 90-Day
Tencor 060534 PCB Assembly, DRAM SFS 4500 & 5500 Used & Tested 90-Day
Tencor PMT-20A Bertan Power Controller - Option 3 SFS 4500 Used & Tested 90-Day
Tencor 054828 Wafer Sensor SFS 4000 New 90-Day