Spare Parts & Consumables

We purchase older, surplus, spare parts from large companies and maintain an inventory with intent to provide repair services with system warranties. Our stock includes Consumables and OEM replacement parts for KLA-Tencor-Prometrix metrology systems. We have everything from replacement Printed Circuit Board Assemblies, to hard to find Sensors and Switches. Our quality control ensures that all parts are tested and conform to OEM specifications. We also provide competitive quotes for your overstocked, obsolete, extra parts, or idle equipment. All Parts are subject to availability. Please contact us for additional information and pricing. Payment and shipping options below.

Current Spare Part Listings

Surfscan 45/5500 Parts

SFS-45/5500 Parts

SurfScan 6xxx Parts

SFS-6xxx Parts

Alpha-Step 200/300 Parts

AS-200/300 Parts

P-X Profiler Parts

P-X Parts

P-XX  Profiler Parts

P-XX Parts

Motors

Misc. Motors

Pittman Motors

Pittman Motors

RS Series  Parts

RS-Series Parts

FT Series Parts

FT-Series Parts

Misc. Parts

Miscellaneous Parts

Wafer Chucks & Locators

Chucks & Locators

UV-1050

UV-1050 Parts

SP1/SP1-TBI

SP1/SP1-TBI

ThermaWave

Therma-Wave

ThermaWave

Handler Parts

ThermaWave

Lasers

Cables

Cables

 

 

 




Payment

We accept Visa, Master Card, American Express, Money Order, Cashiers Check or Bank Transfer.

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Shipping

FedEx, UPS, and DHL only. We can ship International, but require YOU to provide an account number. If you desire shipment outside the U.S. Please contact us.