Tencor UV-1050 Spare Parts

Currently stocking parts for UV-1050 Thin Film Measurement Systems. All Parts are offered with 30-day right to return and subject to availability. Please contact us for additional information and pricing.

Manufacturer KLA PN Tencor PNDescriptionWorks with ConditionWarrantyPic
Prometrix   39-0128 Encoder 500 CPR, 5/32” UV-Series New 90-Day
Tencor   55-0552 Cable Assy Steel Shuttle Drive UV-1050 New 90-Day
Tencor   54-0274 Reference Assy Sample   New 90-Day
Prometix   52-0365 Assembly Brake Clutch   New 90-Day
Prometix   39-0155 Assembly Brake Failsafe   New 90-Day
Prometix   55-0253 Turret – I/F cable UV-1050/1250 New 90-Day
Prometix   54-0264 PCA PC Interface Altera Chip UV-1050/1250 New 90-Day
Prometrix   54-0302 PCB Assy, Measurement Control UV / FT New 90-Day
Tencor   52-0668  UV Heat Sink Assembly   UV-1050 New 90-Day