KLA Tencor Lasers & Power Supplies

We stock KLA, Melles Griot, Lumentum and JDSU Lasers for KLA Tencor Surfscan 6100 | 6200 | 6220 | 6400 | 6420 | 4500 | 5500 Wafer Inspection Systems. All Parts are subject to availability. All lasers and power supplies are new and include a one year warranty. Please contact us for additional information and pricing.

NEW! We now sell CVI-Melles Griot lasers, Model# 05-LHR-121 and laser power supplies for the
  Gaertner Ellipsometer L115S300.


Lasers

Manufacturer KLA PN Part No Model Description Works with Pic
Melles Griot     05-LHR-121 Laser Tube Assembly Gaertner Ellipsometer L115S300
Lumentum   22037137 22037137 Laser Tube Assembly SFS-5500/6100
Lumentum 0248605-001 21104871 2214-30SLQTT Laser Tube Assembly - Label SFS-7700
JDSU 0224471-001 365998 2214-30SLQTA Argon-New tube 6XX0, SP1 (not SP1-TBI or DLS
Lumentum 0224471-001 21152263 2214-30SLKTC Argon-New - Lumentum KLA 6XX0, SP1 (not SP1-TBI or DLS
JDSU   094650 1103P-0613 Laser Tube Assembly SFS-4500


Power Supplies

Manufacturer KLA PN Part No Model Description Works with Pic
Melles Griot     05-LPM-911-065 Laser Power Supply Gaertner Ellipsometer L115S300
Melles Griot   105317 05-LPM-901-050 Laser Power Supply SFS-4500
Melles Griot   132314 05-LPM-902-065 Laser Power Supply - CALL SFS-5500/6100
JDSU 0603619-000   2114B-30SLT Argon laser 30MW - Sticker 6XX0, SP1 (not SP1-TBI or DLS)
Lumentum 0603619-000   2110U-SLS Argon laser 30MW - CALL 6XX0, SP1 (not SP1-TBI or DLS)
JDSU 0249827-000   2114B-30SLQST Argon laser 30MW - Sticker 6XX0, SP1 (not SP1-TBI or DLS)
JDSU 22106622 0595933-000   2110-SLT-8470 Common 75MW - Sticker 6XX0, SP1-TBI and SP1-DLS

 

Melles Griot Model Number: 05-LHP-151-206 – Requires old laser trade-in with polarization rings because laser we sell has rings already installed making installation time faster and laser alignment more accurate.

JDSU Laser Model Number: 2214-30SLQTA – Requires old laser trade-in with installation rings because laser we sell has rings installed.

JDSU Laser Model Number: 1103P-0613 – Raw Laser with no installation rings, engineer polarize laser during installation/calibration.