Metrology Equipment Services, LLC - Metrology Equipment Sales and Service including Refurbished systems, Spare Parts, Consumables, On-Site Field Engineering, and In-House Repair/Calibration Services for KLA-Tencor-Prometrix advanced semiconductor measuring systems. For more than 15 years, MES has provided products and services to the semiconductor, aerospace and medical industries. Our team is dedicated to discovering, developing and implementing the right solutions for your university or company.

SurfScan Service

Specialized Service for SurfScan Systems

Our team provides full service for SFS-6100, 6200, 6220, 6400, and 6420 systems, including: Laser Replacements, P.M. & Calibration Services, Troubleshooting, Repair, Refurbishing, Installation and Training.

Refurbished Equipment

Refurbished Equipment -- $2500 discount for the Month of April

We buy and sell high quality refurbished wafer measurement tools. All our refurbished systems come with a parts and labor warranty. For customers located in the Bay Area, installation is included with the purchase. If shipment is needed, we provide free crating for select systems. Please contact us for availability and quote.

Parts & Consumables

Parts & Consumables

We stocks spare parts for many metrology systems including consumables, OEM and certified refurbished parts which conform to the manufacture's specifications. Our listings have been divided into several pages: SFS45/5500, SFS 6xxx, AS Series, P Series, Prometrix RS/FT, SM200/300, Misc.,  Wafer Chucks/Locators/Handlers, Motors, Optiprobe 2600B, UV-1050, SP1/SP1-TBI and Lasers.

In-House Service

In-House Repair/Calibration & Refurbishing Services

Our highly trained engineers provide In-house repair and calibration services. We offer 3-5 business day turnaround on equipment repairs and calibrations are covered under a 90-Day warranty. Service Blanket Accounts are offered to customers with multiple systems. Loaner tools are available for select systems.

On-Site Engineering Service

On-Site Field Engineering Service

Our metrology systems engineers are a responsive team of experts committed to help you achieve or maintain your ISO 9000 or NIST-traceable stature. We offer prompt and efficient, On-site repair and calibration services for your equipment. Personalized service contracts are available.