KLA-Tencor/Prometrix - Surfscan-6xx0 Spare Parts
We stock spare parts for Surfscan 6100 | 6200 | 6220 | 6400 | 6420 Wafer Inspection Systems. All Parts are subject to availability. Please contact us for additional information and pricing. Surfscan Laser listings.
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PCB Assy T2VPCI Board |
| Manufacturer | Part# | Description | Works with | Condition | Warranty | Pic |
|---|---|---|---|---|---|---|
| Tencor | 176230 | Remote Gain Adjustment BD | SFS-6xx0 | Used & Tested | 90-Day |  |
| Tencor | Wafer Sensor Micro Switch | SFS-6xx0 | Used & Tested | 90-Day |  |
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| Tencor | Alignment Cage Ring | SFS-6xx0 | Used & Tested | 90-Day |  |
|
| Vexta | D9CL-9.5A | Vexta Clean Damper | SFS-6xx0 | New | 90-Day |  |
| KLA-Tencor | 2030962 | 486 33MHz Intel CPU PCB - sticker | SFS-6xx0 | Used & Tested | 90-Day |  |
| Tencor | USL37544S | PCB Assembly, CPU, Pentium 75 | SFS-6xx0 | Used & Tested | 90-Day |  |
| Condor | HCBB105W-A | DC Power supply - Rear View | SFS-6xx0 | Used & Tested | 90-Day |  |
| KLA-Tencor | 165506 | PMT Analog PCB Interface Cable Assy. | SFS-6200 | New | 90-Day |  |
| Elco | P50E-12 | Power Supply 12V DC - Top View | SFS-6200 | Used & Tested | 90-Day |  |
| Fluoroware | Locator piece, FL 182/150mm, 6 inch | SFS-6xx0 | New | 90-Day |  |
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| Fluoroware | Locator piece, FL 192/200mm, 8 inch | SFS-6xx0 | New | 90-Day |  |
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| Tencor | 162744 | Field Mirror | SFS-6200 | New | 90-Day |  |
| Tencor | 505161 | Blower box Assembly | Surfscan AIT 2 | Used & Tested | 90-Day |  |
| Tencor | 228192 | Silicon Reflector Strip Assy | SFS-62x0 | New | 90-Day |  |
| Tencor | 157473 | 12V DC Vacuum solenoid Assembly | Used & Tested | 90-Day |  |
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| Tencor | 157228 | Sensor Assembly - HomeOpto Switch - Call | SFS-6xx0 | New | 90-Day |  |