Motors for KLA-Tencor/Prometrix Systems
Currently stocking Motors for KLA-Tencor and Prometrix systems. All listings below are used & tested unless marked as new, come with a 90-day warranty and are subject to availability. Please contact us for additional information and pricing.
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Auto Stage Motor Assembly
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| KLA PN | KLA-Tencor- Prometrix |
Model | Manufacturer | Description | Works with | Pic |
|---|---|---|---|---|---|---|
| 32228264 | Telcom | Motor Assembly | FT-Series |  |
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| MC61FS-62007 | Superior Electric | Synchronous Stepping Motor | SFS4500/5500 |  |
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| M061-LS08 | Superior Electric | Synchronous Stepping Motor - Trolley | SFS4500/5500 |  |
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| 15/3 - 1670:1 | MiniMotor SA | Motor Assembly - Swiss made |  |
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| C11 213 E 5 | ESCAP | Motor Assembly - 64:1 |  |
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| M 11 207 0 | ESCAP | Motor Assembly - 18,6:1 |  |
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| 21 216E B120X 5 | ESCAP | Motor Assembly | AS200/250 |  |
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| 22CF 90 208V 1 | ESCAP | Motor Assembly |  |
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| 22B2464:1 | ESCAP | Motor Assembly | Swiss made |  |
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| 034371 | K24.0 | ESCAP | Scan Motor – 2048:1 Swiss - Assembly | AS-200 |  |
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| 730-401243-00 | L92421-P1 | AIRPAX | Motor 5 VDC |  |
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| 4023-819 | Applied Motion | Stepping Motor 5.1 Volts / 1.0 Amp |  |
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| 5023-333 | Applied Motion | Motor Assembly DC5.1V 1.0A |  |
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| 55-0300 | Buhler | Motor Assembly - DC 18V |  |
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| 3540K012C | Faulhaber Schonaich | Motor Assembly |  |
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| 3540K012C | Micro MO Electronics | Motor Assembly |  |
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| 730-450138-00 | P21NSXA-LDN-NS-02 | Pacific Scientific | Powermax II Motor assembly |  |
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| 52-0272 | Prometrix | Z Motor Assembly | UV-1050/1250/1280 |  |
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| 222496 | Prometrix | Motor Assembly | P-XX |  |
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| 52-0269 | Prometrix | Motor Assembly, X -Drive | UV-1050/1250/1280 |  |
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| 52-0284 | PH265M-31 | Prometrix | Vexta Motor - 6 VDC, .85A | Prometrix UV |  |
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| 52-0268 | Prometrix | Y Motor Assembly | UV-1050/1250/1280 |  |
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| 52-0240 | Prometrix | Motor Assembly, Theta Stage | FT-Series |  |
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| 52-0243 | 42328471 | Prometrix | Motor Assembly, Z Stage |  |
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| 52-0237 | Prometrix | Motor Assembly |  |
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| 3222B264-R2 | Prometrix | Brushless DC servomotor – X-Motor | FT-Series |  |
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| 740-713361-00 | H2HNRFB-TNN-NS-00 | Sigma | Stage Flip Motor |  |
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| 52-0282 | PX243G-01B | Vextra | Motor Assembly | UV-1050/1250/1280 |  |
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| PXC43-01BA | Vexta | Vexta Stepping Motor 2-Phase | FT-Series |  |
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| PX244M-02AA | Vexta | Stepping Motor 2-Phase, DC 6V DC 0.8A | FT-Series |  |
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| PH268-05B | Vexta | Vexta Stepping Motor 2-Phase | FT-Series |  |
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| PH265M-31B-C10 | Vexta | Vexta Stepping Motor 2-Phase | FT-Series |  |
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| 730-401952-00 | 401952 | PH265-05B | Vexta | Vexta Stepping Motor | FT-Series |  |
| PH265M-31 | Vextra | Stepping Motor 2-Phase DC6 .85A |  |