KLA-Tencor/Prometrix SFS-4500/5500 Spare Parts
We stock spare parts for Surfscan 4500 and 5500 Wafer Inspection Systems. All Parts are subject to availability. Please contact us for additional information and pricing. Surfscan Laser listings
 |
High Voltage Power Supply PCB
- Tencor P/N 129861
- 90 Day warranty
- Works with SFS 4500
|
| Manufacturer | Part# | Description | Works with | Condition | Warranty | Pic |
| Tencor |
054364 |
Wafer Indexer Assemly |
4500/5000/5500 |
Used & Tested |
90-Day |
 |
| Tencor |
|
Card Cage / Keyboard Assembly |
SFS 5500 |
Used & Tested |
90-Day |
|
| Tencor |
|
Below Wafer Sensor |
SFS 4500 |
Used & Tested |
90-Day |
|
| Tencor |
|
Lead Screw Assy with Trolley Motor |
SFS 4500 |
Used & Tested |
90-Day |
|
| Tencor |
|
Scan Mirror Assembly |
SFS 4000 |
New |
90-Day |
|
| Tencor |
061050 |
PCB Assy, High Voltage |
SFS 4500 |
Used & Tested |
90-Day |
|
| Venus Scientific |
050946 |
PMT power supply |
SFS 4500 |
New |
90-Day |
|
| Tencor |
079553 |
PMT Preamp Assembly |
SFS 4500 & 5500 |
Used & Tested |
90-Day |
|
| Tencor |
|
LED Post Assembly |
SFS 4500 & 5500 |
Used & Tested |
90-Day |
|
| Tencor |
|
AutoCal / AutoZero Sensor |
SFS 4500 |
Used & Tested |
90-Day |
|
| Tencor |
|
AutoCal / AutoZero Sensor |
SFS 5500 |
Used & Tested |
90-Day |
|
| Tencor |
063967 |
PCB Assy, Slave CPU |
SFS 4500 & 5500 |
Used & Tested |
90-Day |
|
| Tencor |
077054 |
PCB Assy, PPC |
SFS 4500 & 5500 |
Used & Tested |
90-Day |
|
| Tencor |
058457 |
PCB Assy, Preprocessor |
SFS 4500 & 5500 |
Used & Tested |
90-Day |
|
| Tencor |
063975 |
PCB Assy, Memory |
SFS 4500 & 5500 |
Used & Tested |
90-Day |
|
| Hamamatsu |
071471 |
Hamamatsu Photomultiplier Tube |
SFS 4500 & 5500 |
Used & Tested |
90-Day |
|
| Tencor |
054135 |
PCB Assembly, I/O |
SFS 4500 & 5500 |
Used & Tested |
90-Day |
|
| Tencor |
054291 |
PCB Assembly, Keyboard |
SFS 4500 & 5500 |
Used & Tested |
90-Day |
|
| Tencor |
060534 |
PCB Assembly, DRAM |
SFS 4500 & 5500 |
Used & Tested |
90-Day |
|
| Tencor |
PMT-20A |
Bertan Power Controller - Option 3 |
SFS 5500 |
Used & Tested |
90-Day |
|
| Tencor |
054828 |
Wafer Sensor |
SFS 4000 |
New |
90-Day |
|
| Tencor |
128945 |
PCB Assy, Distribution- Call for availability |
SFS 5500 |
Used & Tested |
90-Day |
|
| Tencor |
130311 |
PCB Assy, Below Wafer - Call for availability |
SFS 5500 |
Used & Tested |
90-Day |
|
| Tencor |
093254 |
PCB, Assy, Vac Handler - Call for availability |
SFS 4500 & 5500 |
Used & Tested |
90-Day |
|
| Tencor |
063983 |
PCB Assy, Main CPU - Call for availability |
SFS 4500 & 5500 |
Used & Tested |
90-Day |
|
