Tencor/Prometrix RS-Series Spare Parts

Currently stocking parts for RS-35 and RS-55 Resistivity Measuring Systems.
All Parts are subject to availability. Please contact us for additional information and pricing.

ManufacturerPart#DescriptionWorks with ConditionWarrantyPic
Prometrix 52-0469 Probe Head RS-Series Used & Tested 90-Day
Prometrix 54-8338 Probe Head Interface Connect RS-Series Used & Tested 90-Day
  28-0079 Alumina Sheet 4.5" x 4.5" RS-Series Used & Tested 90-Day
  55-0267 Power Supply RS-Series Used & Tested 90-Day
Tencor 50-0002-01 Type A Probe Head - Side2 - Call for Availability RS-Series New 1-Year MFG
Jandel 50-0002-02 Type B Probe Head - 1 - 2 - 3 - 4 RS-Series New 1-Year MFG
Tencor 50-0002-03-> 12 Type C-H Probe Head - Guide- Call for Availability RS-Series New 1-Year MFG
Clippard   Valve, 3-Way, 24VDC RS-Series Used & Tested 90-Day
Prometrix 49-0252 Theta stage timing belt, .080 x 240 x 1/4" RS-35/55 Used & Tested 90-Day
Prometrix 49-0226 Timing Belt, 080x118, STD RS-Series Used & Tested 90-Day
AMP 5023-024 Motor Assembly - DC=5.4V – 1.5A – 3.6 Ohm – 200S/R RS-Series Used & Tested 90-Day
Clarostat   Stage Sensor RS-55/75 Used & Tested 90-Day
Prometrix 36-0032 PCB Assembly, Interface ART - Call for Availability RS-Series Used & Tested 90-Day
Prometrix 52-0023 SM Display LCD - Back RS-35/50/55 Used & Tested 90-Day
Prometrix 54-0007 ART Analog Backplane RS-Series Used & Tested 90-Day
Prometrix 53-0022 PCB Assy, Digi-4 Configured Rev. H - 30000354 RS-Series Used & Tested 90-Day
Prometrix 55-0655 TC Upgrade Kit without chuck 55TC Used & Tested 90-Day
Prometrix 54-0040 Pneumatic Board Assembly RS-Series Used & Tested 90-Day
Prometrix 1.61.013.342-2 Motor Assembly 18V DC with Bracket RS-Series Used & Tested 90-Day
Prometrix None Switch Assembly, TC RS-Series Used & Tested 90-Day
Prometrix None Probe Arm Assembly RS-Series Used & Tested 90-Day
Prometrix None Control Panel Assembly - Back RS-Series Used & Tested 90-Day
Prometrix 54-0023 PCB Assy, Jumper, 4 Pin Short RS Used & Tested 90-Day
Prometrix 54-0042 PCB Assy, Jumper, 5 Pin Short RS Used & Tested 90-Day
Prometrix 54-0022 PCB Assy, Jumper, 4 Pin Long RS Used & Tested 90-Day
Prometrix 36-0033 PCB Assembly, Theta Sensor, ART RS Used & Tested 90-Day
Prometrix 39-0046 Battery, 12VDC Gel-Cell - PS-1229 RS, VP New 90-Day
Prometrix 54-0039 PCB Assembly, ART I/F Board - Call for Availability RS, VP Used & Tested 90-Day
Prometrix   Practical Peripherals Printer Buffer RS, FT Used & Tested 90-Day
Prometrix 54-0049 PCB Assembly, Parallel I/O Board SM, RS, FT, VP Used & Tested 90-Day
Prometrix 53-0003 Analog to Digital Conversion Board FLX, RS Used & Tested 90-Day
Prometrix 55-1008 TC Air assy, Stage Vacuum Valve RS-Series Used & Tested 90-Day
Prometrix 36-0040 PCB Assembly, Motor Interface RS-Series Used & Tested 90-Day
Prometrix 36-0037 Stepper Motor Driver PCB RS-Series Used & Tested 90-Day
Prometrix 52-0380 Valve Assembly, Vacuum RS-Series Used & Tested 90-Day
Prometrix 54-0219 PCB Assembly, H2 Main Interface--- handler RS-Series Used & Tested 90-Day
Prometrix   200mm Resistivity Standard Model RS8-90 (87.5 ohm-cm) RS-Series New 90-Day
Prometrix   200mm Resistivity Standard Model RS8-30 (30.76 ohm-cm) RS-Series New 90-Day
Prometrix 54-0091 PCB Assy. Top Key BD RS-Series Used & Tested 90-Day
Prometrix 54-0279 Assy, UTF Position Sensor   Used & Tested 90-Day
Prometrix   PSI Switch controller assembly RS-Series Used & Tested 90-Day
Prometrix   Chuck Assembly RS-Series Used & Tested 90-Day
Prometrix   Manual control pad RS-Series Used & Tested 90-Day
Festo ADV-20-10 Stage Solenoid - 10bar/145psi RS-55/75 Used & Tested 90-Day