Tencor/Prometrix SM-200 SM-300 SpectraMap Spare Parts

Currently stocking parts for SM-200 SM-300 Systems. All Parts are subject to availability.
Please contact us for additional information and pricing

ManufacturerPart#DescriptionWorks with ConditionWarrantyPic
Prometrix 54-0049 PCB Assy, Parallel I/O Board SM/RS/FT/VP Used & Tested 90-Day
Prometrix 54-0103 PCB Assy, C2C KYPD Encoder SM Used & Tested 90-Day
Prometrix 51-0045 Prometrix AFT Power Supply SM200/300 Used & Tested 90-Day
Prometrix 53-0003 Analog to Digital Conversion Board  SM/FLX/RS/FT/VP Used & Tested 90-Day
Prometrix 51-0153 Prometrix Radial Stage Assy, Spectramap SM200/300 Used & Tested 90-Day
Prometrix 54-0076 PCB Assy, Interface SM200/300 Used & Tested 90-Day
Prometrix 26-0057 PCB Assy, Pneumatic, Spectramap SM200/300 Used & Tested 90-Day
Prometrix 52-0023 SM Display LCD SM200/300 Used & Tested 90-Day
Prometrix 54-0063 PCB Assy, Lamp interface board SM200/300 Used & Tested 90-Day
Prometrix 50-0112 Lamp Assembly - Call for Availability SM200/300 Used & Tested 90-Day
Prometrix 36-0040 PCB Assy, Motor Interface SM200/300 Used & Tested 90-Day
Prometrix 54-0062 PCB Assy, Diagnostic indicator  SM200/300 Used & Tested 90-Day
Prometrix 54-0119 PCB Assy, Motor Saver SM200/300 Used & Tested 90-Day
Prometrix 54-0046 PCB Assy, Motor Control Board SM200/300 Used & Tested 90-Day
Prometrix 51-0001 Theta Stage Assyembly SM200/300 Used & Tested 90-Day